SEMI C93:2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2020
Superseded date
07-06-2022
Superseded by
€125.00
Excluding VAT
This Document describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications.
| DocumentType |
Guide
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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