SEMI C93:2020
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System
Available format(s)
Hardcopy
Superseded date
07-06-2022
Language(s)
English
Published date
01-06-2020
This Document describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications.
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