SEMI D10 : 1995(R2003)
Current
The latest, up-to-date edition.
TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES
12-01-2013
Test procedure specifies quantitatively the durability of flat panel display (FPD) glass substrates using reagents employed in FPD production processes. This standard may be used by vendors or buyers of glass substrates for FPD. This standard specifies three methods for testing chemical durability of various flat panel display substrates. Each procedure provides a measure of the amount of material that is taken from a substrate during a controlled chemical reaction sequence.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
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