SEMI D12 : 1995(R2003)
Current
The latest, up-to-date edition.
SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES
12-01-2013
Specifies various aspects of the edges of a flat panel display substrate and describes their relationships. Assuming the existence of terminology described in other SEMI flat panel display documents. Applicable to substrates where the nominal thickness specification is 1.1 mm. The edges of a flat panel display substrate are important in both the specifications for and uses of the material. Effecting the means for making, handling, storing and processing substrates. Specifying the terminology and the geometric properties of these edges will help both the producers and users of substrates and processing/inspection equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI T8 : 2010 | SPECIFICATION FOR MARKING OF GLASS FLAT PANEL DISPLAY SUBSTRATES WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
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