SEMI D44 : 2006E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL
Published date
12-01-2013
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Describes the datum line that specifies the position of the FPD manufacturing equipment, the position of the substrate, and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (07/2006) E = This standard was editorially modified to correct an error. (03/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI D51 : 2009 | SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION |
| SEMI D49 : 2007 | SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION |
| SEMI D48 : NOV 2007 | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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