SEMI D44 : 2006E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL
Published date
12-01-2013
Describes the datum line that specifies the position of the FPD manufacturing equipment, the position of the substrate, and the mutual positional relationship required to describe each position when AMHS loads and unloads the substrate to or from the manufacturing equipment.
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