SEMI D48 : NOV 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL
Published date
12-01-2013
Defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.
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