SEMI D48 : NOV 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL
Published date
12-01-2013
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Defines the datum line of an ID two-dimensional code (hereafter, 2D-ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader/unloader and robot), substrate, and substrate ID.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D49 : 2007 | SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION |
| SEMI D52 : 2008E | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID |
| SEMI D32 : 2003(R2009) | SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D44 : 2006E | SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL |
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