SEMI E105 : 2001
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK SCHEDULING COMPONENT
Published date
12-01-2013
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Provides specification Factory Operations, Material Transport and Storage, Production Machine, and Equipment Tracking and Maintenance components by ordering, in time, jobs that process material on equipment, move material, and maintain equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E102 : 2000(R2006) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT |
| SEMI E97 : 2000A(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK GLOBAL DECLARATIONS AND ABSTRACT INTERFACES |
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
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