SEMI E107 : 2002(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION OF ELECTRIC FAILURE LINK DATA FORMAT FOR YIELD MANAGEMENT SYSTEM
Published date
12-01-2013
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Describes the data file format for transferring from test equipment to a Yield Management System.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI G81 : 2007(R2015) | SPECIFICATION FOR MAP DATA ITEMS |
| SEMI G85 : JUL 2003 | SPECIFICATION FOR MAP DATA FORMAT |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
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