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SEMI E30.1 : 2017

SEMI E30.1 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)

Superseded date

23-05-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to the definition of Inspection, Review, and Inspection/Review equipment behavior as perceived by a SEMI Equipment Communications Standard II (SEMI E5/SECS-II) host that complies with SEMI E30.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2006) No longer published within the SEMI E30 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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SEMI E159 : 2014 MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS
SEMI E112 : OCT 2017 SPECIFICATION FOR A 150 MM MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES

SEMI M20 : 2015 PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM
SEMI E37.1 : 2002(R2013) HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES
SEMI E58 : JUL 2003 AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES

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