SEMI E118.1 : NOV 2004
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR WAFER ID READER COMMUNICATION INTERFACE STANDARDS
Published date
12-01-2013
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Maps the services and data of the Wafer ID Reader (WIDR) standard to SECS-II streams and functions and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2003) Not available separately, Published within the SEMI E118 family of standards. INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
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