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SEMI E4 : 1999(R2007)

SEMI E4 : 1999(R2007)

Current

Current

The latest, up-to-date edition.

SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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