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SEMI E118.1 : NOV 2004

SEMI E118.1 : NOV 2004

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR WAFER ID READER COMMUNICATION INTERFACE STANDARDS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of the Wafer ID Reader (WIDR) standard to SECS-II streams and functions and data definitions.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2003) Not available separately, Published within the SEMI E118 family of standards. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)

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