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SEMI E120.1 : 2014

SEMI E120.1 : 2014

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides an XML schema that corresponds to the UML model for equipment defined by SEMI E120.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, included in SEMI E120. (03/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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