SEMI E120.1 : 2014
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
Published date
12-01-2013
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Provides an XML schema that corresponds to the UML model for equipment defined by SEMI E120.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, included in SEMI E120. (03/2010)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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