SEMI E121 : 2017

Name: SEMI E121 : 2017
Brand: SEMI

Superseded

GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

Superseded date

17-05-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to promote interoperable application of XML in a variety of semiconductor manufacturing usage contexts.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI (02/2004)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI E121:2017(R2023)

SEMI E138 : 2017	SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
SEMI E132.1 : 2014	SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA)
SEMI E120 : 2014	SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
SEMI E120.1 : 2014	SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
SEMI E132 : 2015	SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION
SEMI E134.1 : 2014	SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM)
SEMI E134 : 2014	SPECIFICATION FOR DATA COLLECTION MANAGEMENT
SEMI E139.3 : 2011	XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT
SEMI E125 : 2014	SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E145 : 2014	CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML
SEMI E133 : 2018	SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE
SEMI E125.1 : 2014	SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E139.1 : 2010	XML SCHEMA FOR THE RAP PDE
SEMI E142 : MAR 2006	SPECIFICATION FOR SUBSTRATE MAPPING

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