SEMI E126 : 2008(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR EQUIPMENT QUALITY INFORMATION PARAMETERS (EQIP)
Hardcopy
05-09-2023
English
16-07-2018
Specifies for use by OEMs, users, and third party equipment and process control system suppliers who need to achieve equipment and process control of select process quality parameters, utilizing standardized methods for actuation of process control parameters.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2003) Also available in CD-ROM format. (02/2008)
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
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