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SEMI E98 : 2009

SEMI E98 : 2009

Current

Current

The latest, up-to-date edition.

PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides definitions, services, and behavior, as seen through communications with the factory, for the common types of physical and logical objects of which equipment is typically composed, including the equipment itself.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E98.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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