SEMI E127.1 : 2008
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)
Published date
12-01-2013
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Maps the services and data of IMMC to SECS-2 streams and functions and data definitions. Applies to all implementations of IMMC that use the SECS-2 message protocol (SEMI E5).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004) Not available separately, Published within the SEMI E127 family of standards. INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E90.1 : 2011 | SPECIFICATION FOR SECS-2 PROTOCOL SUBSTRATE TRACKING |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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