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SEMI E127 : 2008

SEMI E127 : 2008

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data ports where these are commonly implemented by different suppliers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (06/2003) Includes SEMI E127.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E127.1 : 2008 SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC)
SEMI E131 : 2004(R2010) SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M
SEMI E141 : 2005 GUIDE FOR SPECIFICATION OF ELLIPSOMETER EQUIPMENT FOR USE IN INTEGRATED METROLOGY

SEMI E120 : 2014 SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM)
SEMI E42 : 2004 RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES
SEMI E41 : 1995 EXCEPTION MANAGEMENT (EM) STANDARD
SEMI E116 : 2017 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING
SEMI M20 : 2015 PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E32 : 1997 MATERIAL MOVEMENT MANAGEMENT (MMM)
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E30.5 : 2002(R2017) SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL (MSEM)
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
SEMI E53 : 2004 EVENT REPORTING
SEMI E58 : JUL 2003 AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES

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