Name: SEMI E130.1 : 2004(R2010)
Brand: SEMI
Availability: InStock

SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Relates the services and data of SEMI E130 to SECS-II streams and functions, and data definitions. Also covers equipment supporting automated communication of the prober equipment.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI E130 family of standards. (07/2010)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E130 : 2017	SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI E37 : 2013	HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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SEMI E130.1 : 2004(R2010)

SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)

Abstract

General Product Information

Standards Referencing This Book

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Subcategory