SEMI E130.1 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
Published date
12-01-2013
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Relates the services and data of SEMI E130 to SECS-II streams and functions, and data definitions. Also covers equipment supporting automated communication of the prober equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI E130 family of standards. (07/2010)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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