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SEMI E130 : 2017

SEMI E130 : 2017

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E130.1. (10/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
SupersededBy

SEMI E130.1 : 2004(R2010) SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI T13 : 2004(R2010) SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES

SEMI E94 : 2014 SPECIFICATION FOR CONTROL JOB MANAGEMENTT
SEMI E42 : 2004 RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES
SEMI M20 : 2015 PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM
SEMI G81 : 2007(R2015) SPECIFICATION FOR MAP DATA ITEMS
SEMI E40 : 2013 STANDARD FOR PROCESSING MANAGEMENT
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI G85 : JUL 2003 SPECIFICATION FOR MAP DATA FORMAT
SEMI E87 : 2017 SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

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