SEMI E132:2019
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Equipment Client Authentication and Authorization
Hardcopy
17-05-2022
English
01-04-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Standard specifies a method for restricting access to communication with equipment by requiring clients to authenticate to the equipment before proceeding with subsequent communication, and provides a flexible authorization scheme to control client access. Authorization allows parties who want to exchange information with or control the equipment to do so on a need-to-know and/or need-to-use basis.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E134:2022 | Specification for Data Collection Management |
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