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SEMI E132 : 2015

SEMI E132 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION

Superseded date

18-05-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to all semiconductor manufacturing equipment that requires authentication and authorization for its services.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI (02/2004) Includes SEMI E132.1. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E160 : 2011(R2017) SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
SEMI E151 : 2011(R2017) GUIDE FOR UNDERSTANDING DATA QUALITY
SEMI E139.3 : 2011 XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT
SEMI E138 : 2017 SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)

SEMI E128 : 2014 SPECIFICATION FOR XML MESSAGE STRUCTURES
SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

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