SEMI E132:2022
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Equipment Client Authentication and Authorization
Hardcopy
15-10-2022
English
01-04-2022
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Standard specifies a method for restricting access to communication with equipment by requiring clients to authenticate to the equipment before proceeding with subsequent communication, and provides a flexible authorization scheme to control client access.
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
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