SEMI E133 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR AUTOMATED PROCESS CONTROL SYSTEMS INTERFACE
Superseded date
12-04-2024
Superseded by
Published date
12-01-2013
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Specifies PCS capabilities, functional groups (FGs), and FG interfaces.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2004) Includes SEMI E133.1. (02/2007)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E148 : 2009(R2014) | SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT |
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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