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SEMI E139.1 : 2010

SEMI E139.1 : 2010

Current

Current

The latest, up-to-date edition.

XML SCHEMA FOR THE RAP PDE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes an XML-based format for transferring recipe components. Also includes an XML schema that corresponds to the UML model for the RaP Process Definition Element (PDE) as defined by SEMI E139. And also an XML schema is defined for the Manifest that must be included in the TransferContainer with the PDE's during transfer.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2005) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

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