SEMI E139.1 : 2010
Current
Current
The latest, up-to-date edition.
XML SCHEMA FOR THE RAP PDE
Published date
12-01-2013
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Describes an XML-based format for transferring recipe components. Also includes an XML schema that corresponds to the UML model for the RaP Process Definition Element (PDE) as defined by SEMI E139. And also an XML schema is defined for the Manifest that must be included in the TransferContainer with the PDE's during transfer.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2005) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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