SEMI E139.2 : 2008
Current
Current
The latest, up-to-date edition.
SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP)
Published date
12-01-2013
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Provides a mapping of the RaP communication services to the SECS-II protocol. Also provides accurate representation of RaP services as defined in SEMI E139 in SECS-II format.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2006) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E139 : 2013 | SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
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