Name: SEMI E139.2 : 2008
Brand: SEMI

SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a mapping of the RaP communication services to the SECS-II protocol. Also provides accurate representation of RaP services as defined in SEMI E139 in SECS-II format.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (07/2006) Not available separately, included in SEMI E139. (03/2010) INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E4 : 1999(R2007)	SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
SEMI E37 : 2013	HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES
SEMI E139 : 2013	SPECIFICATION FOR RECIPE AND PARAMETER MANAGEMENT (RAP)

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SEMI E139.2 : 2008

SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP)

Abstract

General Product Information

Standards Referencing This Book

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