SEMI E142 : MAR 2006
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SUBSTRATE MAPPING
Superseded date
05-10-2020
Published date
12-01-2013
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Specifies the data items that are required to report, store and transmit map data for substrates such as wafers, frames, strips and trays.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005) Includes SEMI E142.1, SEMI E142.2 and SEMI E142.3. (10/2016)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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