SEMI E143 : 2006(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR MEASURING POWER AND VARIATION INTO A 50-OHM LOAD AND POWER VARIATION AND SPECTRUM INTO A LOAD WITH A VSWR OF 2.0 AT ANY PHASE ANGLE
12-04-2024
12-01-2013
Provides an accurate method for measuring the output power and spectral content of RF generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E114 : 2002E(R2016) | TEST METHOD FOR RF CABLE ASSEMBLIES USED IN SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS |
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