SEMI E143 : 2006(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR MEASURING POWER AND VARIATION INTO A 50-OHM LOAD AND POWER VARIATION AND SPECTRUM INTO A LOAD WITH A VSWR OF 2.0 AT ANY PHASE ANGLE
12-04-2024
12-01-2013
Provides an accurate method for measuring the output power and spectral content of RF generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.