SEMI E144 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
Published date
12-01-2013
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Gives public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing (pre-2006) equipment installations.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006) Supersedes SEMI PR10. (04/2008)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| Supersedes |
| SEMI HB3 : 2016 | SPECIFICATION FOR THE MECHANICAL INTERFACE FOR 150 MM HB-LED LOAD PORT |
| SEMI M80 : 2016 | SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E159 : 2014 | MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E158 : 2014 | MECHANICAL SPECIFICATION FOR FAB WAFER CARRIER USED TO TRANSPORT AND STORE 450 MM WAFERS (450 FOUP) AND KINEMATIC COUPLING |
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