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SEMI E144 : 2012

SEMI E144 : 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing (pre-2006) equipment installations.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006) Supersedes SEMI PR10. (04/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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