SEMI E145:2014(R2024)
Current
Current
The latest, up-to-date edition.
Classification for Measurement Unit Symbols in XML
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.The inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E5:2024 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
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