SEMI E145:2014(R2024)
Current
Current
The latest, up-to-date edition.
Classification for Measurement Unit Symbols in XML
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
€150.00
Excluding VAT
The inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E5:2024 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
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