SEMI E145:2014(R2019)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Classification for Measurement Unit Symbols in XML
Hardcopy
11-03-2024
English
01-05-2019
The inclusion of extensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology.
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