SEMI E154 : 2014
Current
Current
The latest, up-to-date edition.
MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
Published date
12-01-2013
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Specifies the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (04/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E162 : 2012 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT |
| SEMI E156 : 2015 | SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT |
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI M80 : 2016 | SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E159 : 2014 | MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E166 : 2014 | SPECIFICATION FOR 450 MM CLUSTER MODULE INTERFACE: MECHANICAL INTERFACE AND TRANSPORT STANDARD |
| SEMI E110 : 2002(R2009) | GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS |
| SEMI E63 : 2016 | SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE |
| SEMI E158 : 2014 | MECHANICAL SPECIFICATION FOR FAB WAFER CARRIER USED TO TRANSPORT AND STORE 450 MM WAFERS (450 FOUP) AND KINEMATIC COUPLING |
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