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SEMI E166 : 2014

SEMI E166 : 2014

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR 450 MM CLUSTER MODULE INTERFACE: MECHANICAL INTERFACE AND TRANSPORT STANDARD

Published date

08-06-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the interface plane between modules in a cluster tool.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI E21 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT
SEMI E21.1 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: MECHANICAL INTERFACE AND WAFER TRANSPORT

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