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SEMI E154 : 2014

SEMI E154 : 2014

Current

Current

The latest, up-to-date edition.

MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (04/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E72 : 2016 SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT
SEMI E162 : 2012 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT
SEMI E156 : 2015 SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT
SEMI E83 : 2015 SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE
SEMI M80 : 2016 SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS
SEMI E159 : 2014 MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS
SEMI E166 : 2014 SPECIFICATION FOR 450 MM CLUSTER MODULE INTERFACE: MECHANICAL INTERFACE AND TRANSPORT STANDARD

SEMI E110 : 2002(R2009) GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS
SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
SEMI E158 : 2014 MECHANICAL SPECIFICATION FOR FAB WAFER CARRIER USED TO TRANSPORT AND STORE 450 MM WAFERS (450 FOUP) AND KINEMATIC COUPLING

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