SEMI E156 : 2015
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT
Published date
12-01-2013
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Specifies interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E159 : 2014 | MECHANICAL SPECIFICATION FOR MULTI APPLICATION CARRIER (MAC) USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E154 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT |
| SEMI E158 : 2014 | MECHANICAL SPECIFICATION FOR FAB WAFER CARRIER USED TO TRANSPORT AND STORE 450 MM WAFERS (450 FOUP) AND KINEMATIC COUPLING |
| SEMI G92 : 2015 | SPECIFICATION FOR TAPE FRAME CASSETTE FOR 450 MM WAFER |
| SEMI M80 : 2016 | SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS |
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