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SEMI E156 : 2015

SEMI E156 : 2015

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 MM AUTOMATED MATERIAL HANDLING SYSTEMS (AMHS) STOCKER TO TRANSPORT EQUIPMENT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2010)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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