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SEMI E162 : 2012

SEMI E162 : 2012

Current

Current

The latest, up-to-date edition.

MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be loaded and unloaded.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2011)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E83 : 2015 SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE
SEMI M80 : 2016 SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS

SEMI E154 : 2014 MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT
SEMI M80 : 2016 SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS

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