SEMI E162 : 2012
Current
Current
The latest, up-to-date edition.
MECHANICAL INTERFACE SPECIFICATION FOR 450 MM FRONT-OPENING SHIPPING BOX LOAD PORT
Published date
12-01-2013
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Specifies the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be loaded and unloaded.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI M80 : 2016 | SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS |
| SEMI E154 : 2014 | MECHANICAL INTERFACE SPECIFICATION FOR 450 MM LOAD PORT |
| SEMI M80 : 2016 | SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 MM WAFERS |
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