SEMI E170 : DEC 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)
Published date
04-08-2014
Superseded date
04-05-2019
Superseded by
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Specifies a standardized 'secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment' which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (08/2014) Includes SEMI E170.1. (02/2015)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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