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SEMI E87 : 2017

SEMI E87 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

Superseded date

08-11-2018

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E87.1. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E138 : 2017 SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
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SEMI E169 : 2015 GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY
SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E157 : 2011(R2016) SPECIFICATION FOR MODULE PROCESS TRACKING
SEMI E98 : 2009 PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM)
SEMI E174 : 2017 SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
SEMI E130 : 2017 SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
SEMI E118 : NOV 2004E SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE
SEMI E168 : 2015 SPECIFICATION FOR PRODUCT TIME MEASUREMENT
SEMI E170 : DEC 2017 SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)
SEMI E87.1 : 2017 PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS)
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI HB4 : 2013 SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)
SEMI E84 : 2009(R2017) SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE
SEMI E171 : FEB 2016 SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)
SEMI E147 : 2007E GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA)
SEMI E110 : 2002(R2009) GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS

SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
SEMI E15-1 : 2005(R2010) SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
SEMI E90 : 2012(R2018) SPECIFICATION FOR SUBSTRATE TRACKING
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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