SEMI E171:2024
Current
The latest, up-to-date edition.
Specification for Predictive Carrier Logistics (PCL)
Hardcopy
English
01-05-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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