Name: SEMI E171 : FEB 2016
Brand: SEMI

SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)

Published date

06-10-2014

Publisher

Semiconductor Equipment & Materials Institute

Pertains to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (09/2014) Includes SEMI E171.1. (12/2015)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E171 : FEB 2016

SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)

Abstract

General Product Information

Standards Referencing This Book

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