SEMI E172 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)
Superseded date
05-10-2020
Superseded by
Published date
09-02-2015
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Specifies the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2015)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E173 : 2015 | SPECIFICATION FOR XML SECS-2 MESSAGE NOTATION (SMN) |
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