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SEMI E173 : 2015

SEMI E173 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR XML SECS-2 MESSAGE NOTATION (SMN)

Superseded date

10-05-2015

Published date

11-05-2015

Publisher

Semiconductor Equipment & Materials Institute

Specifies a standardized notation to represent the content of SECS-II messages or the total message when SECS-II messages are sent or received using the SECS-I or HSMS protocol.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2015)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E172 : 2018 SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD)

SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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