SEMI E173 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR XML SECS-2 MESSAGE NOTATION (SMN)
Superseded date
10-05-2015
Superseded by
Published date
11-05-2015
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Specifies a standardized notation to represent the content of SECS-II messages or the total message when SECS-II messages are sent or received using the SECS-I or HSMS protocol.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2015)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E172 : 2018 | SPECIFICATION FOR SECS EQUIPMENT DATA DICTIONARY (SEDD) |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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