SEMI E174 : 2017
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
08-11-2018
02-01-2017
Specifies a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2016)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
| SEMI E40.1 : 2013 | SECS-2 SUPPORT FOR PROCESSING MANAGEMENT STANDARD |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI T7 : 2016 | SPECIFICATION FOR BACK SURFACE MARKING OF DOUBLE-SIDE POLISHED WAFERS WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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