SEMI E174 : 2017
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)
08-11-2018
02-01-2017
Specifies a communication method which observes and/or controls every single wafer (including its related information) on equipment individually (and independently rather than a member of a lot) through single management point from the host.
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