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SEMI E179:2023

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for Protocol Buffers Common Components

Available format(s)

Hardcopy

Superseded date

15-10-2024

Superseded by

SEMI E179:2024

Language(s)

English

Published date

01-06-2023

€152.54
Excluding VAT

This Specification is a central location for the definition of common Protocol Buffers elements that are not specific to a single standard, but are common across multiple standards.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E5:2023 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E132:2022-09 Specification for Equipment Client Authentication and Authorization
SEMI E138-0319 Specification for XML Semiconductor Common Components
SEMI E145 : 2014 CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

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