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SEMI E145 : 2014

SEMI E145 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

Superseded date

11-03-2024

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the measurement units' symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E160 : 2011(R2017) SPECIFICATION FOR COMMUNICATION OF DATA QUALITY
SEMI E125 : 2014 SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E138 : 2017 SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS
SEMI E164 : 2014 SPECIFICATION FOR EDA COMMON METADATA
SEMI E125.1 : 2014 SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD)
SEMI E179:2023 Specification for Protocol Buffers Common Components

SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION
SEMI E121 : 2017 GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS

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