SEMI E179:2023
Current
Current
The latest, up-to-date edition.
Specification for Protocol Buffers Common Components
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2023
This Specification is a central location for the definition of common Protocol Buffers elements that are not specific to a single standard, but are common across multiple standards.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E5:2023 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
| SEMI E138-0319 | Specification for XML Semiconductor Common Components |
| SEMI E145 : 2014 | CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML |
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