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SEMI E179:2023

SEMI E179:2023

Current

Current

The latest, up-to-date edition.

Specification for Protocol Buffers Common Components

Available format(s)

Hardcopy

Language(s)

English

Published date

01-06-2023

Publisher

Semiconductor Equipment & Materials Institute

This Specification is a central location for the definition of common Protocol Buffers elements that are not specific to a single standard, but are common across multiple standards.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E5:2023 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E138-0319 Specification for XML Semiconductor Common Components
SEMI E145 : 2014 CLASSIFICATION FOR MEASUREMENT UNIT SYMBOLS IN XML

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