SEMI E20 : 1997(R2002)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND EMERGENCY OFF STANDARD
01-11-2010
12-01-2013
Describes the emergency off capability to the modules of a cluster tool; to allow module emergency off disconnect and reconnect in a safe manner without removing power from the rest of the tool; and to prevent power from being applied to a module when its emergency off is non-functional.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E21 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.