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SEMI E20 : 1997(R2002)

SEMI E20 : 1997(R2002)

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

CLUSTER TOOL MODULE INTERFACE: ELECTRICAL POWER AND EMERGENCY OFF STANDARD

Withdrawn date

01-11-2010

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the emergency off capability to the modules of a cluster tool; to allow module emergency off disconnect and reconnect in a safe manner without removing power from the rest of the tool; and to prevent power from being applied to a module when its emergency off is non-functional.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI E21 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT

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