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SEMI E21 : 2015

SEMI E21 : 2015

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the interface plane between modules in a cluster tool.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E21.1. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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