SEMI E24 : 1992(R2004)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
CLUSTER TOOL MODULE INTERFACE: ISOLATION VALVE INTERLOCKS STANDARD
01-07-2010
12-01-2013
This standard is used to prevent any opening or closing of the isolation valve(s), which would result in an unsafe condition or possible damage to material or equipment. Describes hardware inter-locks that govern the opening and closing of the environmental isolation valve(s) at the interface planes of a cluster tool.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E21 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE: MECHANICAL INTERFACE AND WAFER TRANSPORT |
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